Nonvolatile random access memory

ABSTRACT

According to one embodiment, a memory includes a memory cell array with banks, each bank including rows, a first word lines provided in corresponding to the rows, an address latch circuit which latches a first row address signal, a row decoder which activates one of the first word lines, and a control circuit which is configured to execute a first operation which activates one of the banks based on a bank address signal when a first command is loaded, and a second operation which latches the first row address signal in the address latch circuit, and execute a third operation which activates one of the first word lines by the row decoder based on a second row address signal and the first row address signal latched in the address latch circuit when a second command is loaded after the first command.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application claims the benefit of U.S. Provisional Application No.61/803,997, filed Mar. 21, 2013, the entire contents of which areincorporated herein by reference.

FIELD

Embodiments described herein relate generally to a nonvolatile randomaccess memory.

BACKGROUND

Nonvolatile random access memories such as a magnetic random accessmemory have been researched and developed as memories for replacingvolatile memories such as a DRAM and SRAM.

To reduce the development cost and perform smooth replacement, it isdesirable to operate the nonvolatile random access memories by using thesame specifications as those of the DRAM and SRAM. It is also possibleto achieve low power consumption and normally-off computing by using thenonvolatile random access memories by, e.g., increasing the number ofbanks forming a memory cell array and minimizing the number of banks tobe activated among these banks.

If the number of banks forming the memory cell array increases, however,the number of bits of an address for selecting each of these banks alsoincreases. To achieve the same specifications as those of a versatileDRAM and SRAM as described above, it is necessary to construct a systemin which the number of pins does not increase and the operating speeddoes not decrease even when the number of bits of an address increases.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a view showing a nonvolatile random access memory;

FIG. 2 is a view showing the specifications of an interface;

FIG. 3 is a view showing a memory core and peripheral circuit;

FIG. 4 is a view showing a memory cell array;

FIG. 5 is a timing chart showing the first embodiment;

FIG. 6 is a timing chart showing the second embodiment;

FIGS. 7, 8, 9, 10, 11, and 12 are views showing examples of the loadingof commands and addresses of the second embodiment;

FIG. 13 is a timing chart showing the third embodiment;

FIG. 14 is a timing chart showing the fourth embodiment;

FIGS. 15, 16, and 17 are views showing examples of the loading ofcommands and addresses of the fourth embodiment;

FIGS. 18 and 19 are views showing a hierarchical word-line structure;

FIG. 20 is a view showing a variation of the activation timings ofmain/sub word lines of the second embodiment; and

FIG. 21 is a view showing a variation of the activation timings ofmain/sub word lines of the fourth embodiment.

DETAILED DESCRIPTION

In general, according to one embodiment, a nonvolatile random accessmemory comprises: a memory cell array with banks, each bank includingrows; a first word lines provided in corresponding to the rows; anaddress latch circuit which latches a first row address signal; a rowdecoder which activates one of the first word lines; and a controlcircuit which is configured to: execute a first operation whichactivates one of the banks based on a bank address signal when a firstcommand is loaded, and a second operation which latches the first rowaddress signal in the address latch circuit, and execute a thirdoperation which activates one of the first word lines by the row decoderbased on a second row address signal and the first row address signallatched in the address latch circuit when a second command is loadedafter the first command.

[Nonvolatile Random Access Memory]

FIG. 1 shows a nonvolatile random access memory.

A nonvolatile random access memory 10 includes a memory core 11,peripheral circuit 12, and interface 13.

The memory core 11 includes a plurality of magnetoresistive elements(memory cells) for storing data. The peripheral circuit 12 executes dataread/write for the memory core 11.

The interface 13 receives control signals CNT for read/write, a clocksignal CK for controlling the operation timings of read/write, and acommand & address signal CA[n:0] for determining an internal operationfor read/write and designating an address of the memory cell to beaccessed in the memory core 11.

Also, the interface 13 outputs read data DOUT[m:0] and receives writedata DIN[m:0].

CA[n:0] means (n+1)-bit command & address signals CA[n], CA[n−1], . . ., CA[0]. DOUT[m:0] means (m+1)-bit read data DOUT[m], DOUT[m−1], . . . ,DOUT[0]. DIN[m:0] means (m+1)-bit write data DIN[m], DIN[m−1], . . . ,DIN[0].

Note that both of n and m are natural numbers.

FIG. 2 shows the specifications of the interface.

The interface 13 of the nonvolatile random access memory 10 has two datapath systems in order to, e.g., output the read data DOUT[m:0] andreceive the write data DIN[m:0] in parallel, thereby improving thethroughput.

It is, however, also possible to use the same data path system as aninput path and output path.

According to the control signal CNT and the command & address signalCA[n:0], in the present embodiment, the control signal CNT comprisesonly a clock enable signal CKE and a chip select signal bCS, and adecoding of the command of read, write and so on, is executed base on acoded command using CA[n:0].

Note that CK is a clock signal for executing the data input/output andthe command input described above synchronously.

FIG. 3 shows the memory core and peripheral circuit.

The memory core 11 includes a memory cell array 21, row decoder 22, andcolumn decoder 23. The memory cell array 21 includes k (k is a naturalnumber of 2 or more) banks B0, B1, . . . , Bk. Since the banks B0, B1, .. . , Bk can independently be activated, the power consumption can bereduced by, e.g., activating only necessary banks during read/write.

The row decoder 22 decodes, e.g., an x-bit bank address signal BA[x:0]for selecting one of the k banks B0, B1, . . . , Bk, and a y-bit rowaddress signal AR[y:0] for selecting one row in the selected bank. Therow address signal AR[y:0] may also include, e.g., an upper bit, mediumbit, and lower bit.

The column decoder 23 decodes, e.g., a z-bit column address signalAC[z:0] for selecting one column in the memory cell array 21.

The peripheral circuit 12 includes a command & address latch circuit 24,data latch circuit 25, control circuit 26, address latch circuit 27, andclock generator 28.

The command & address latch circuit 24 receives the command & addresssignal CA[n:0] from a host 14. That is, the command & address latchcircuit 24 temporarily holds a command signal CMD for determining aninternal operation for read/write, and an address signal ADD fordesignating an address in the memory core 11.

The command signal CMD is transferred to the control circuit 25. Thecontrol circuit 25 controls an internal operation based on the controlsignals CNT and command signal CMD from the host 14.

Of the address signal ADD, the bank address signal BA[x:0] istransferred to the row decoder 22, the row address signal AR[y:0] istransferred to the address latch circuit 26, and the column addresssignal AC[z:0] is transferred to the column decoder 23.

In this embodiment as will be described later, when an active commandfor activating a word line (row) in a selected bank is input, a portionof the row address signal AR[y:0] is input to the address latch circuit26. Also, when a predetermined command preceding the active command isinput, another portion of the row address signal AR[y:0] is input to theaddress latch circuit 26 in advance.

As described above, a portion of the row address signal AR[y:0] is inputin advance before the active command is input. Therefore, even when, forexample, the number of bits of the row address signal AR[y:0] forselecting a word line (row) in the memory cell array 21 increases, thenonvolatile random access memory can be incorporated into the systemwithout increasing the number of pins and decreasing the operatingspeed, i.e., without changing the specifications.

Note that the predetermined command is, e.g., a bank precharge commandfor precharging a selected bank. When the bank precharge command isinput, the row decoder 22 receives the bank address signal BA[x:0], andstarts precharging the selected bank.

The active command is a command for performing an active operation ofactivating one (selected word line) of a plurality of word lines in aselected bank. The bank precharge command is a command for performing abank precharge operation of setting one (selected bank) of a pluralityof banks in an initial state (precharge state) for read/write.

The data latch circuit 27 temporarily holds the read data DOUT[m:0] orwrite data DIN[m:0]. The read data DOUT[m:0] is read from a memory cellin a selected bank via the column decoder 23. The write data DIN[m:0] iswritten to a memory cell in a selected bank via the column decoder 23.

The clock generator 28 generates an internal clock signal CLK based onthe clock signal CK from the host 14. The internal clock signal CLK isinput to the command & address latch circuit 24, control circuit 25,address latch circuit 26, and data latch circuit 27, and controls theoperation timings of these circuits.

FIG. 4 shows an example of the memory cell array.

In this example, the arrangement of one bank Bk in the memory cell arraywill be explained. Also, a magnetic random access memory is adopted asan example of the nonvolatile random access memory.

A plurality of memory cells MC are arranged in the form of an arrayalong the row and column directions. A plurality of word lines WL0 toWLi-1 are formed in one-to-one correspondence with a plurality of rows,and run in the row direction in the bank Bk. A plurality of bit linesBL0 to BLj-1 run in the column direction in the bank Bk. Note that i isa natural number of 2 or more, and j is an even number of 2 or more.

One memory cell MC includes one magnetoresistive element MTJ and oneselection transistor (FET: Field Effect Transistor) Tr connected inseries. One memory cell MC includes one control node and two currentnodes.

The control node is connected to one word line WLi-1. One of the twocurrent nodes is connected to an even-numbered bit line BLj-2, and theother is connected to an odd-numbered bit line BLj-1.

The magnetoresistive element MTJ includes a first ferromagnetic layer(magnetization pinned layer) in which the magnetization direction isinvariable, a second ferromagnetic layer (magnetization free layer) inwhich the magnetization direction is variable, and an insulating layer(tunnel barrier layer) formed between the first and second ferromagneticlayers.

The magnetoresistive element MTJ is, e.g., a spin-transfer torqueelement capable of changing the magnetization direction in the secondferromagnetic layer by a spin-transfer torque current. That is, aspin-transfer torque current (bidirectional electric current) flowingbetween the even-numbered bit line BLj-2 and odd-numbered bit line BLj-1determines the magnetization direction in the second ferromagnetic layerof the magnetoresistive element MTJ.

Note that the magnetoresistive element MTJ can be either a perpendicularmagnetization type element in which the magnetization direction ofresidual magnetization is perpendicular to the film surface (theinterface between the first or second ferromagnetic layer and theinsulating layer), or an in-plane magnetization type element in whichthis magnetization direction is parallel to the film surface.

EMBODIMENTS

Embodiments using the nonvolatile random access memory shown in FIGS. 1,2, and 3 will be explained below.

That is, the preconditions are that the memory cell array includes aplurality of banks, each bank includes a plurality of rows, and aplurality of word lines are formed in one-to-one correspondence with theplurality of rows.

First & Second Embodiments

FIG. 5 shows a timing chart according to the first embodiment.

The internal clock signal CLK is generated by, e.g., the clock generator28 shown in FIG. 3. In a first clock cycle (one clock cycle) C1 of theinternal clock signal CLK, a bank precharge command (first command) PCGis input (loaded).

When the bank precharge command PCG according to an active bank is inputin state of activating the active bank among a plurality of banks, abank precharge operation (first operation) is performed based on a bankaddress signal, and also performs a preactive operation (secondoperation) of latching first row address signals R_A and R_B in theaddress latch circuit 26 shown in FIG. 3.

That is, the first embodiment has the feature that when the bankprecharge command PCG is input, an operation that the first row addresssignals R_A and R_B are preloaded is added (a region X) as a newpreactive operation separated from the bank precharge operation.

The bank precharge operation is executed as an internal operation of thenonvolatile random access memory by using, e.g., two clock cycles, andthe preactive operation is executed as an internal operation separatedfrom the internal operation of the bank precharge operation of thenonvolatile random access memory by using, e.g., one clock cycle.

In a second clock cycle (one clock cycle) C2 of the internal clocksignal CLK, an active command (second command) Act is input (loaded).

When the active command Act is input, the control circuit 25 shown inFIG. 3 loads second row address signals R_C and R_D, and, based on thesecond row address signals R_C and R_D, and the first row addresssignals R_A and R_B latched in the address latch circuit 26 shown inFIG. 3, performs an active operation (third operation) of activating oneof the plurality of word lines in the memory cell array 21 by the rowdecoder 22 shown in FIG. 3.

Note that the address latch circuit 26 shown in FIG. 3 keeps latchingthe first row address signals R_A and R_B until the active command Actis input.

The active operation is executed as an internal operation of thenonvolatile random access memory by using, e.g., four clock cycles.

Also, a read/write command R/W is input (loaded) in a third clock cycle(one clock cycle) C3 of the internal clock signal CLK.

When the read/write command R/W is input, the control circuit 25 shownin FIG. 3 performs an operation of receiving column address signals C_Aand C_B.

In the first embodiment as described above, the input of the row addresssignals R_A and R_B is available in advance in the time of inputting therow address signals R_A and R_B based on the bank precharge command PCG,separated from the time of inputting the row address signals R_C and R_Dbased on the active command Act.

Therefore, even when, for example, the number of bits of the full rowaddress signals for selecting a plurality of word lines (a plurality ofrows) in the memory cell array 21 shown in FIG. 3 increases, thenonvolatile random access memory can be incorporated into the systemwithout increasing the number of pins and decreasing the operating speeddepending on the addition of inputting the address signal based on theactive command Act, i.e., without large changing the specifications.

FIG. 6 shows a timing chart according to the second embodiment.

When compared to the first embodiment, the second embodiment has thefeature that commands and address signals are loaded based on the highedge (↑) and low edge (↓) of one clock cycle of the internal clocksignal CLK.

The internal clock signal CLK is generated by, e.g., the clock generator28 shown in FIG. 3. At the high edge (time t1) of a first clock cycle(one clock cycle) C1 of the internal clock signal CLK, a bank prechargecommand (first command) PCG is input (loaded).

Also, a portion R_A of a first row address signal is input (loaded) atthe high edge (time t1) of the first clock cycle (one clock cycle) C1,and another portion R_B of the first row address signal is input(loaded) at the low edge (time t2) of the first clock cycle (one clockcycle) C1.

When the bank precharge command PCG is inputted in an active bank instate of activating the active bank among a plurality of banks, a bankprecharge operation (first operation) is performed based on a bankaddress signal, and also performs a preactive operation (secondoperation) of latching the first row address signals R_A and R_B in theaddress latch circuit 26 shown in FIG. 3.

That is, the second embodiment also has the feature that when the bankprecharge command PCG is input, an operation that the first row addresssignals R_A and R_B are preloaded (a region X) is added as new preactiveoperation separated from the bank precharge operation.

The bank precharge operation is executed as an internal operation of thenonvolatile random access memory by using, e.g., two clock cycles, andthe preactive operation is executed as an internal operation separatedfrom the internal operation of the bank precharge operation of thenonvolatile random access memory by using, e.g., one clock cycle.

At the high edge (time t3) of a second clock cycle (one clock cycle) C2of the internal clock signal CLK, an active command (second command) Actis input (loaded).

Also, a portion R_C of a second row address signal is input (loaded) atthe high edge (time t3) of the second clock cycle (one clock cycle) C2,and another portion R_D of the second row address signal is input(loaded) at the low edge (time t4) of the second clock cycle (one clockcycle) C2.

When the active command Act is input, the control circuit 25 shown inFIG. 3 performs an active operation (third operation) of activating oneof the plurality of word lines in the memory cell array 21 by the rowdecoder 22 shown in FIG. 3, based on the second row address signals R_Cand R_D, and the first row address signals R_A and R_B latched in theaddress latch circuit 26 shown in FIG. 3.

Note that the address latch circuit 26 shown in FIG. 3 keeps latchingthe first row address signals R_A and R_B until the active command Actis input.

The active operation is executed as an internal operation of thenonvolatile random access memory by using, e.g., four clock cycles.

Also, a read/write command R/W is input (loaded) at the high edge (timet5) of a third clock cycle (one clock cycle) C3 of the internal clocksignal CLK.

In addition, a portion C_A of a column address signal is input (loaded)at the high edge (time t5) of the third clock cycle (one clock cycle)C3, and another portion C_B of the column address signal is input(loaded) at the low edge (time t6) of the third clock cycle (one clockcycle) C3.

When the read/write command R/W is input, the control circuit 25 shownin FIG. 3 performs a read/write operation by selecting one of aplurality of bit line pairs in the memory cell array 21 by the columndecoder 23 shown in FIG. 3 based on the column address signals C_A andC_B.

As described above, the input of the row addresses is available inadvance in the time of inputting the row address signals R_A and R_Bbased on the bank precharge command PCG separated from the time ofinputting the row address signal R_C and R_D based on the activecommand.

Therefore, even when, for example, the number of bits of the full rowaddress signals for selecting a plurality of word lines (a plurality ofrows) in the memory cell array 21 shown in FIG. 3 increases, thenonvolatile random access memory can be incorporated into the systemwithout increasing the number of pins and decreasing the operating speeddepending on the addition of inputting the address signal based on theactive command, i.e., without large changing the specifications.

FIGS. 7, 8, 9, 10, 11, and 12 show examples of the loading of commandsand addresses in the first and second embodiments.

In these drawings, CLK denotes an internal clock signal generated basedon the clock signal CK input from a clock terminal (pin). Also, CA0 toCA9 denote command & address signals input from command & addressterminals (pins).

In the examples, the number of command & address terminals CA0 to CA9 is10. However, the number of terminals is 10 in order to make theexplanation clearly understandable, and hence is not limited to thisvalue.

Also, it is assumed in the following explanation that the number ofbanks in the memory cell array is eight, and the number of bits of bankaddress signals BA0, BA1, and BA2 for selecting these banks is three.However, these numbers are also so set as to make the explanationreadily understandable, and hence are not limited to these values.

Furthermore, in the examples, it is assumed that the full row addresssignal has 18 bits from R0 to R17, and a first row address signal (aportion of the full row address signal) that is input when the bankprecharge command PCG is input has upper bits R14 to R17.

These numbers are also examples, however, and what is important for thisembodiment is that a portion of the full row address signal is input inadvance when the bank precharge command PCG is input.

FIGS. 7 and 8 are examples in which an assignment of the two kind ofbank address is available, and an assignment of a bank as a target ofthe precharge operation and a bank as a target of the preactiveoperation is available separately, in the bank precharge command.

In “Case 1a” of FIG. 7, the bank precharge command (H, H, L, H) isloaded into the nonvolatile random access memory from the command &address terminals CA0 to CA3 based on the high edge (↑) of the internalclock signal CLK.

Also, a flag AB for determining whether to perform an all-bank prechargeoperation is loaded into the nonvolatile random access memory from thecommand & address terminal CA4 based on the high edge (↑) of theinternal clock signal CLK. The all-bank precharge operation is anoperation of returning all of the active banks to the banks of thestandby state.

In addition, the bank address signals BA0, BA1, and BA2 as targets ofthe precharge operation are loaded into the nonvolatile random accessmemory from the command & address terminals CA7 to CA9 based on the highedge (↑) of the internal clock signal CLK.

After that, the first row address signal (the upper bits R14 to R17 ofthe full row address signal) is loaded into the nonvolatile randomaccess memory from the command & address terminals CA3 to CA6 based onthe low edge (↓) of the internal clock signal CLK (the preactiveoperation).

Also, the bank address signals BA0, BA1, and BA2 as targets of thepreactive operation are loaded into the nonvolatile random access memoryfrom the command & address terminals CA7 to CA9 based on the low edge(↓) of the internal clock signal CLK.

Note that in FIG. 7, X means that the terminal is not used to load acommand or address signal at the high edge (↑) or low edge (↓) of theinternal clock signal CLK.

“Case 1b” in FIG. 8 is a modification of “Case 1a” in FIG. 7.

This example shown in FIG. 8 differs from the example shown in FIG. 7 inthat the first row address signal (the upper bits R14 to R17 of the fullrow address signal) is loaded into the nonvolatile random access memorybased on the high edge (↑) and low edge (↓) of the internal clock signalCLK.

That is, in this example, the upper bits R14 and R15 of the full rowaddress signal are loaded into the nonvolatile random access memory fromthe command & address terminals CA5 and CA6 based on the high edge (↑)of the internal clock signal CLK, and the upper bits R16 and R17 of thefull row address signal are loaded into the nonvolatile random accessmemory from the command & address terminals CA5 and CA6 based on the lowedge (↓) of the internal clock signal CLK (the preactive operation).

The rest is the same as the example shown in FIG. 7, so a repetitiveexplanation will be omitted.

FIGS. 9 and 10 are examples in which an assignment of a bank address isone kind only, and a bank as a target of the precharge operation and abank as a target of the preactive operation are the same.

“Case 2a” in FIG. 9 differs from “Case 1a” in FIG. 7 in that the bankaddress signals BA0, BA1, and BA2 are loaded into the nonvolatile randomaccess memory based on only the high edge (↑) of the internal clocksignal CLK because the back precharge operation and active operationhave the same bank as a target.

That is, in this example, the bank address signals BA0, BA1, and BA2 areloaded into the nonvolatile random access memory from the command &address terminals CA7 to CA9 based on the high edge (↑) of the internalclock signal CLK, and the bank address signal which is inputted based onthe low edge (↓) of the internal clock signal CLK does not exist.

The rest is the same as the example shown in FIG. 7, so a repetitiveexplanation will be omitted.

“Case 2b” in FIG. 10 differs from “Case 1b” in FIG. 8 in that the bankaddress signals BA0, BA1, and BA2 are loaded into the nonvolatile randomaccess memory based on only the high edge (↑) of the internal clocksignal CLK because the back precharge operation and active operationhave the same bank as a target.

That is, in this example, the bank address signals BA0, BA1, and BA2 areloaded into the nonvolatile random access memory from the command &address terminals CA7 to CA9 based on the high edge (↑) of the internalclock signal CLK, and are not input based on the low edge (↓) of theinternal clock signal CLK.

The rest is the same as the example shown in FIG. 8, so a repetitiveexplanation will be omitted.

In case of FIGS. 7 to 10, the bank precharge operation and the preactiveoperation are executed by the bank precharge command only. In contrast,in FIGS. 11 and 12, the preactive command is defined newly, the bankprecharge operation is executed based on the bank precharge commandonly, the preactive operation is executed based on the preactive commandonly, and the bank precharge command and the preactive command areinputted continuously by a high edge and a low edge in the same clock.

An example for realizing the internal operation as same as “Case 1a” inFIG. 7 and an example for realizing the internal operation as same as“Case 1b” in FIG. 8 will be explained below by inputting continuouslythe bank precharge command and the preactive command.

FIG. 11 is an example for realizing the internal operation as same as“Case 1a” in FIG. 7.

In this example, “Case 3a-1”, “Case 3a-2”, or “Case 3a-3” is selectable.

For example, “Case 3a-1” is based on “Case 1a”, and the preactivecommand (L, H) is loaded into the nonvolatile random access memory fromthe command & address terminals CA0 and CA1 based on the low edge (↓) ofthe internal clock signal CLK, in addition to the bank precharge command(H, H, L, H).

In “Case 3a-2”, only the bank precharge operation in “Case 3a-1” isperformed. In this case, the command and address signal are loaded basedon only the high edge (↑) of the internal clock signal CLK, and are notloaded at the low edge (↓) of the internal clock signal CLK.

In “Case 3a-3”, only the preactive operation in “Case 3a-1” isperformed. In this case, the command and address signal are loaded basedon only the low edge (↑) of the internal clock signal CLK, and are notloaded at the high edge (↓) of the internal clock signal CLK.

FIG. 12 is an example for realizing the internal operation as same as“Case 1b” in FIG. 8.

In this example, “Case 3b-1”, “Case 3b-2”, or “Case 3b-3” is selectable.

For example, “Case 3b-1” is based on “Case 1b”, and the preactivecommand (L, H) is loaded into the nonvolatile random access memory fromthe command & address terminals CA0 and CA1 based on the low edge (↓) ofthe internal clock signal CLK, in addition to the bank precharge command(H, H, L, H).

In “Case 3b-2”, only the bank precharge operation in “Case 3b-1” isperformed. In this case, the command and address signal are loaded basedon only the high edge (↑) of the internal clock signal CLK, and are notloaded at the low edge (↓) of the internal clock signal CLK.

In “Case 3b-3”, only the preactive operation in “Case 3b-1” isperformed. In this case, the command and address signal are loaded basedon only the low edge (↓) of the internal clock signal CLK, and are notloaded at the high edge (↑) of the internal clock signal CLK.

Third & Fourth Embodiments

FIG. 13 shows a timing chart according to the third embodiment.

The internal clock signal CLK is generated by, e.g., the clock generator28 shown in FIG. 3. A read/write with auto-precharge command (firstcommand) R/W&AP is input (loaded) in a first clock cycle (one clockcycle) C1 of the internal clock signal CLK.

When the read/write with auto-precharge command R/W&AP is input to theactive bank in state of activating the active bank among a plurality ofbanks, the bank precharge operation (first operation) is performed basedon the bank address signal, and also performs a preactive operation(second operation) of latching a first row address signal R_A in theaddress latch circuit 26 shown in FIG. 3.

That is, the third embodiment has the feature that when the read/writewith auto-precharge command R/W&AP is input, the operation that thefirst row address signal R_A is preloaded (a region X) as new preactiveoperation separated from the bank precharge operation.

Also, the control circuit 25 shown in FIG. 3 performs an operation ofreceiving column address signals C_A and C_B when the read/write withauto-precharge command R/W&AP is input.

The bank precharge operation is performed as an internal operation ofthe nonvolatile random access memory by using, e.g., two clock cycles,and the preactive operation is performed as an internal operationseparated from the internal operation of the bank precharge operation ofthe nonvolatile random access memory by using, e.g., one clock cycle.

In addition, an active command (second command) Act is input (loaded) ina second clock cycle (one clock cycle) C2 of the internal clock signalCLK.

When the active command Act is input, the control circuit 25 shown inFIG. 3 loads second row address signals R_B and R_C, and, based on thesecond row address signals R_B and R_C, and the first row address signalR_A latched in the address latch circuit 26 shown in FIG. 3, performs anactive operation (third operation) of activating one of the plurality ofword lines in the memory cell array 21 by the row decoder 22 shown inFIG. 3.

Note that the address latch circuit 26 shown in FIG. 3 keeps latchingthe first row address signal R_A until the active command Act is input.

The active operation is executed as an internal operation of thenonvolatile random access memory by using, e.g., four clock cycles.

In the third embodiment as described above, the input of the row addresssignal R_A is available in advance in time of inputting the row addresssignal R_A based on the bank precharge command separated from the timeof inputting the row address signal R_B and R_C based on the activecommand.

Therefore, even when, for example, the number of bits of the full rowaddress signals R_A, R_B, and R_C for selecting a plurality of wordlines (a plurality of rows) in the memory cell array 21 shown in FIG. 3increases, the nonvolatile random access memory can be incorporated intothe system without increasing the number of pins and decreasing theoperating speed depending the addition of inputting the address signal,i.e., without large changing the specifications.

FIG. 14 shows a timing chart according to the fourth embodiment.

When compared to the third embodiment, the fourth embodiment has thefeature that commands and address signals are loaded based on the highedge (↑) and low edge (↓) of one clock cycle of the internal clocksignal CLK.

The internal clock signal CLK is generated by, e.g., the clock generator28 shown in FIG. 3. A read/write with auto-precharge command (firstcommand) R/W&AP is input (loaded) at the high edge (time t1) of a firstclock cycle (one clock cycle) C1 of the internal clock signal CLK.

Also, a portion C_A of a column address signal is input (loaded) at thehigh edge (time t1) of the first clock cycle (one clock cycle) C1, andanother portion C_B of the column address signal is input (loaded) atthe low edge (time t2) of the first clock cycle (one clock cycle) C1.

In addition, a first row address signal R_A is input (loaded) at the lowedge (time t2) of the first clock cycle (one clock cycle) C1.

When the read/write with auto-precharge command R/W&AP is input to anactive bank in state of activating the active bank among a plurality ofbanks, the bank precharge operation (first operation) is performed basedon the bank address signal, and also performs a preactive operation(second operation) of latching the first row address signal R_A in theaddress latch circuit 26 shown in FIG. 3.

That is, the fourth embodiment also has the feature that when theread/write with auto-precharge command R/W&AP is input, an operationthat the first row address signal R_A is preloaded (a region X) as newpreactive operation is added separated from the bank prechargeoperation.

The bank precharge operation is executed as an internal operation of thenonvolatile random access memory by using, e.g., two clock cycles, andthe preactive operation is executed as an internal operation separatedfrom the internal operation of the bank precharge operation of thenonvolatile random access memory by using, e.g., one clock cycle.

An active command (second command) Act is input (loaded) at the highedge (time t3) of a second clock cycle (one clock cycle) C2 of theinternal clock signal CLK.

Also, a portion R_B of a second row address signal is input (loaded) atthe high edge (time t3) of the second clock cycle (one clock cycle) C2,and another portion R_C of the second row address signal is input(loaded) at the low edge (time t4) of the second clock cycle (one clockcycle) C2.

When the active command Act is input, the control circuit 25 shown inFIG. 3 performs an active operation (third operation) of activating oneof the plurality of word lines in the memory cell array 21 by the rowdecoder 22 shown in FIG. 3, based on the second row address signals R_Band R_C, and the first row address signal R_A latched in the addresslatch circuit 26 shown in FIG. 3.

Note that the address latch circuit 26 shown in FIG. 3 keeps latchingthe first row address signal R_A until the active command Act is input.

The active operation is executed as an internal operation of thenonvolatile random access memory by using, e.g., four clock cycles.

As described above, the input of the row address signal is available inadvance in time of inputting the row address signal R_A based on thebank precharge command PCG separated from the time of inputting the rowaddress signal R_B and R_C based on the active command Act.

Therefore, even when, for example, the number of bits of the full rowaddress signals R_A, R_B, and R_C for selecting a plurality of wordlines (a plurality of rows) in the memory cell array 21 shown in FIG. 3increases, the nonvolatile random access memory can be incorporated intothe system without increasing the number of pins and decreasing theoperating speed depending on the addition of inputting the addresssignal based on the active command Act, i.e., without large changing thespecifications.

FIGS. 15, 16, and 17 show examples of the loading of commands andaddresses in the third and fourth embodiments.

In these drawings, CLK denotes an internal clock signal generated basedon the clock signal CK input from a clock terminal (pin). Also, CA0 toCA9 denote command & address signals input from command & addressterminals (pins).

In the examples, the number of command & address terminals CA0 to CA9 is10. However, the number of terminals is 10 in order to make theexplanation clearly understandable, and hence is not limited to thisvalue.

Also, it is assumed in the following explanation that the number ofbanks in the memory cell array is eight, and the number of bits of bankaddress signals BA0, BA1, and BA2 for selecting these banks is three.However, these numbers are also so set as to make the explanationreadily understandable, and hence are not limited to these values.

Furthermore, in the examples, it is assumed that the full row addresssignal have 18 bits from R0 to R17, and a first row address signal (aportion of the full row address signal) that is input when theread/write with auto-precharge command R/W&AP is input have upper bitsR14 to R17.

These numbers are also examples, however, and what is important for thisembodiment is that a portion of the full row address signal is input inadvance when the bank precharge command PCG is input.

“Case 4” in FIG. 15 is an example that an allocation of a bank addressis one kind only, and a bank as a target of the precharge and a bank asa target of the preactive operation are the same.

As shown in FIG. 15, the read/write with auto-precharge command isloaded into the nonvolatile random access memory from the command &address terminals CA0 to CA2 (H, L, H/L) based on the high edge (↑) ofthe internal clock signal CLK, and is also loaded into the nonvolatilerandom access memory from the command & address terminal CA0 (H(AP))based on the low edge (↓) of the internal clock signal CLK.

Also, column address signals C1 and C2 are loaded into the nonvolatilerandom access memory from the command & address terminals CA5 and CA6based on the high edge (↑) of the internal clock signal CLK, and columnaddress signals C3 to C7 are loaded into the nonvolatile random accessmemory from the command & address terminals CA1 to CA5 based on the lowedge (↓) of the internal clock signal CLK.

In this example, the full column address signal has seven bits from C1to C7.

In addition, the bank address signals BA0, BA1, and BA2 as targets ofthe read/write with auto-precharge operation are loaded into thenonvolatile random access memory from the command & address terminalsCA7 to CA9 based on the high edge (↑) of the internal clock signal CLK.

Also, the first row address signal (the upper bits R14 to R17 of thefull row address signal) is loaded into the nonvolatile random accessmemory from the command & address terminals CA6 to CA9 based on the lowedge (↓) of the internal clock signal CLK (the preactive operation).

Note that in FIG. 15, X means that the terminal is not used to load acommand or address signal at the high edge (↑) or low edge (↓) of theinternal clock signal CLK.

FIGS. 16 and 17 are examples that two kind of allocation of the bankaddress is available, a bank as a target of the precharge operation anda bank as a target of the preactive operation are allocated separatelyin the read/write with auto-precharge command.

In “Case 5a” of FIG. 16, the read/write with auto-precharge command isloaded into the nonvolatile random access memory from the command &address terminals CA0 to CA2 (H, L, H/L) based on the high edge (↑) ofthe internal clock signal CLK, and is also loaded into the nonvolatilerandom access memory from the command & address terminal CA0 (H(AP))based on the low edge (↓) of the internal clock signal CLK.

Also, the column address signals C1 and C2 are loaded into thenonvolatile random access memory from the command & address terminalsCA5 and CA6 based on the high edge (↑) of the internal clock signal CLK,and the column address signals C3 and C4 are loaded into the nonvolatilerandom access memory from the command & address terminals CA1 and CA2based on the low edge 4) of the internal clock signal CLK.

In this example, the full column address signal has four bits from C1 toC4.

In addition, the bank address signals BA0, BA1, and BA2 as targets ofread/write are loaded into the nonvolatile random access memory from thecommand & address terminals CA7 to CA9 based on the high edge (↑) of theinternal clock signal CLK.

Also, the bank address signals BA0, BA1, and BA2 as targets of theauto-precharge operation and preactive operation are loaded into thenonvolatile random access memory from the command & address terminalsCA7 to CA9 based on the low edge (↓) of the internal clock signal CLK.

Furthermore, the first row address signal (the upper bits R14 to R17 ofthe full row address signal) is loaded into the nonvolatile randomaccess memory from the command & address terminals CA3 to CA6 based onthe low edge (L) of the internal clock signal CLK (the preactiveoperation).

Note that in FIG. 16, X means that the terminal is not used to load acommand or address signal at the high edge (↑) or low edge (↓) of theinternal clock signal CLK.

In “Case 5b” of FIG. 17, the read/write with auto-precharge command isloaded into the nonvolatile random access memory from the command &address terminals CA0 to CA2 (H, L, H/L) based on the high edge (↑) ofthe internal clock signal CLK, and is also loaded into the nonvolatilerandom access memory from the command & address terminal CA0 (H(AP))based on the low edge (↓) of the internal clock signal CLK.

Also, the column address signals C1 to C4 are loaded into thenonvolatile random access memory from the command & address terminalsCA3 to CA6 based on the high edge (↑) of the internal clock signal CLK.

In this example, the full column address signal has four bits from C1 toC4.

In addition, the bank address signals BA0, BA1, and BA2 as targets ofread/write are loaded into the nonvolatile random access memory from thecommand & address terminals CA7 to CA9 based on the high edge (↑) of theinternal clock signal CLK.

Also, the bank address signals BA0, BA1, and BA2 as targets of theauto-precharge operation and preactive operation are loaded into thenonvolatile random access memory from the command & address terminalsCA7 to CA9 based on the low edge (↓) of the internal clock signal CLK.

Furthermore, the first row address signal (the upper bits R14 to R17 ofthe full row address signal) is loaded into the nonvolatile randomaccess memory from the command & address terminals CA3 to CA6 based onthe low edge (↓) of the internal clock signal CLK (the preactiveoperation).

Note that in FIG. 17, X means that the terminal is not used to load acommand or address signal at the high edge (↑) or low edge (↓) of theinternal clock signal CLK.

A characteristics of the “Case 5b” is that all of the address signal forread/write are inputted base on the high edge (↑) of the internal clocksignal CLK. As a result, the command can be performed independent of thelow edge (↓) of the internal clock signal CLK different from the “Case5a”.

Application Examples

The first to fourth embodiments become very effective when combined witha hierarchical word line type memory cell array.

This is so because the hierarchical word line system includes, whenselecting one word line (one row) of a memory cell array, steps of firstselecting one main word line common to a plurality of sub word lines byusing an upper address, and then selecting one of the plurality of subword lines included in the selected main word line by using a medium orlower address.

That is, the operating speed of the nonvolatile random access memory canbe increased by combining the first and second embodiments with thehierarchical word line type memory cell array.

FIG. 18 shows the hierarchical word line type memory cell array.

In this example, the memory cell array includes a plurality of banks B0to B3. Each of the plurality of banks B0 to B3 includes main rowdecoders 30-0 to 30-3, sub row decoders 31-0 to 31-3, sub arrays 32A and32B, and sense amplifiers S/A.

Note that the number of banks B0 to B3 is not limited to four and needonly be two or more. Note also that the number of sub arrays 32A and 32Bin one bank Br (r is one of 0 to 3) is not limited to two and can alsobe three or more.

Main word lines MWL0 to MWL3 run in the row direction from the main rowdecoders 30-0 to 30-3. A plurality of sub word lines SWLr0 to SWLrt (tis a natural number) run in the row direction from the sub row decoders31-0 to 31-3.

One main word line MWLr is common to the plurality of sub word linesSWLr0 to SWLrt. For example, the main word line MWL0 is common to aplurality of sub word lines SWL01 to SWL0 t.

The sense amplifiers S/A are arranged at the two ends of the sub arrays32A and 32B in the column direction. A pair of bit lines BL0 and BL1 runin the column direction from the sub arrays 32A and 32B.

FIG. 19 shows the main row decoder and sub row decoder shown in FIG. 18.

Since the main and sub row decoders in the plurality of banks have thesame arrangement, the main row decoder 30-0 and sub row decoder 31-0shown in FIG. 18 will be explained below. In addition, to make thefollowing explanation clearly understandable, it is assumed that thenumber of sub word lines SWL01 to SWL03 common to the main word lineMWL0 is four.

The main row decoder 30-0 controls the activation of the main word lineMWL0 based on the upper bit of a row address signal.

For example, when the memory cell array is combined with the first tofourth embodiments described above, a NAND circuit 33 as the main rowdecoder 30-0 receives a first row address signal (e.g., R14 to R17) φ1that is preloaded when the bank precharge command PCG or read/write withauto-precharge command R/W&AP is input.

In this example, the main word line MWL0 is activated when all bits ofthe first row address signal φ1 are “H”. That is, the main word lineMWL0 changes to “L”.

As will be described later, the activation timing of the main word lineMWL0 can be the timing at which the bank precharge command PCG orread/write with auto-precharge command R/W&AP is loaded, or the timingat which the active command Act is loaded after that.

When the main word line MWL is “L” (activated), a p-channel FET (FieldEffect Transistor) 35 a is ON and an n-channel FET 35 b is OFF in adriver unit 34. That is, the sub row decoder 31-0 is also activated atthis point of time.

The sub row decoder 31-0 controls the activation of the sub word linesSWL00 to SWL03 in the sub arrays 32A and 32B based on the medium orlower bit of the row address signal.

For example, when the memory cell array is combined with theabove-described first to fourth embodiments, an AND circuit 36 as thesub row decoder 31-0 receives second row address signal set (e.g., R0 toR13) φ20 to φ27 that are loaded when the active command Act is input.

In this example, the sub word line SWL00 in the sub array 32A isactivated when all bits of the second row address signal set φ20 are“H”.

That is, at this point of time, the output from the AND circuit 36 towhich the second row address signal set φ20 is input is “H”, and ann-channel FET 37 in the driver unit 34 corresponding to the second rowaddress signal set φ20 is OFF.

Accordingly, the output “H” from the AND circuit 36 to which the secondrow address signal set φ20 is input is transferred to the sub word lineSWL00 in the sub array 32A.

At this point of time, at least one of the row address signal among thesecond row address signal set φ21 to φ27 is “L”. That is, since theoutput from the AND circuit 36 to which these row address signal set φ21to φ27 are input is all “L”, the sub word lines SWL01 to SWL03 in thesub array 32A and all sub word lines SWL00 to SWL03 in the sub array 32Bare deactivated.

The activation timing of the sub word line SWL00 is, e.g., the timing atwhich the active command Act is loaded.

Note that the activation timings of the main word line MWL0 and sub wordline SWL00 are different in this example, but they may also be the same.

When the activation timings of the main word line MWL0 and SWL00 are thesame, this activation timing can be the timing at which the bankprecharge command PCG or read/write with auto-precharge command R/W&APis loaded, or the timing at which the active command Act is loaded afterthat.

FIGS. 20 and 21 show the activation timings of the main and sub wordlines in the hierarchical word line system shown in FIGS. 18 and 19.

FIG. 20 corresponds to the first and second embodiments described above.

Referring to FIG. 20, t1 to t4 correspond to t1 to t4 shown in FIG. 6,and row address signals R_A, R_B, R_C, and R_D correspond to the rowaddress signals R_A, R_B, R_C, and R_D shown in FIG. 6.

In Example A, R_A is latched at time t1, R_B is latched at time t2, andR_C is latched at time t3. At time t4, R_D is latched, and an operationof activating the main word line MWL0 and sub word line SWL00 shown inFIGS. 18 and 19 is performed based on the row address signals R_A, R_B,R_C, and R_D.

In Example B, R_A is latched at time t1. At time t2, R_B is latched, andan operation of activating the main word line MWL0 shown in FIGS. 18 and19 is performed based on the row address signals R_A and R_B. At timet3, R_C is latched. At time t4, R_D is latched, and an operation ofactivating the sub word line SWL00 shown in FIGS. 18 and 19 is performedbased on the row address signals R_C and R_D.

Note that it is also possible to activate the main word line MWL0 basedon R_A and a part of R_B, and activate the sub word line SWL00 based ona part of R_B, and R_C and R_D.

In Example C, R_A is latched at time t1. At time t2, R_B is latched, andan operation of activating the main word line MWL0 and sub word lineSWL00 shown in FIGS. 18 and 19 is performed based on the row addresssignals R_A and R_B. Also, R_C is latched at time t3, and R_D is latchedat time t4. The row address signals R_C and R_D are used not for thepurpose of selecting the main word line MWL0 and sub word line SWL00,but for the purpose of, e.g., determining a memory cell to be connectedto the sense amplifier S/A.

The examples A, B and C are examples. Thereof, the main word line MWL0and the sub word line SWL00 can be activated in a timing except thetiming described the examples A, B and C.

FIG. 21 corresponds to the third and fourth embodiments described above.

Referring to FIG. 21, t2 to t4 correspond to t2 to t4 shown in FIG. 14,and row address signals R_A, R_B, and R_C correspond to the row addresssignals R_A, R_B, and R_C shown in FIG. 14.

In Example A, R_A is latched at time t2, R_B is latched at time t3, andR_C is latched at time t4. Also, at time t4, an operation of activatingthe main word line MWL0 and sub word line SWL00 shown in FIGS. 18 and 19is performed based on the row address signals R_A, R_B, and R_C.

In Example B, at time t2, R_A is latched, and an operation of activatingthe main word line MWL0 shown in FIGS. 18 and 19 is performed based onthe row address signal R_A. Also, R_B is latched at time t3, and R_C islatched at time t4. In addition, at time t4, an operation of activatingthe sub word line SWL00 shown in FIGS. 18 and 19 is performed based onthe row address signals R_B and R_C.

In Example C, at time t2, R_A is latched, and an operation of activatingthe main word line MWL0 and sub word line SWL00 shown in FIGS. 18 and 19is performed based on the row address signal R_A. Also, R_B is latchedat time t3, and R_C is latched at time t4. The row address signals R_Band R_C are used not for the purpose of selecting the main word lineMWL0 and sub word line SWL00, but for the purpose of, e.g., determininga memory cell to be connected to the sense amplifier S/A.

The examples A, B and C are examples. Thereof, the main word line MWL0and the sub word line SWL00 can be activated in a timing except thetiming described the examples A, B and C.

While certain embodiments have been described, these embodiments havebeen presented by way of example only, and are not intended to limit thescope of the inventions. Indeed, the novel embodiments described hereinmay be embodied in a variety of other forms; furthermore, variousomissions, substitutions and changes in the form of the embodimentsdescribed herein may be made without departing from the spirit of theinventions. The accompanying claims and their equivalents are intendedto cover such forms or modifications as would fall within the scope andspirit of the inventions.

What is claimed is:
 1. A nonvolatile random access memory comprising: amemory cell array with banks, each bank including rows; a first wordlines provided in corresponding to the rows; an address latch circuitwhich latches a first row address signal; a row decoder which activatesone of the first word lines; and a control circuit which is configuredto: execute a first operation which activates one of the banks based ona bank address signal when a first command is loaded, and a secondoperation which latches the first row address signal in the addresslatch circuit, and execute a third operation which activates one of thefirst word lines by the row decoder based on a second row address signaland the first row address signal latched in the address latch circuitwhen a second command is loaded after the first command.
 2. The memoryof claim 1, wherein the first command is a bank precharge command, andthe first operation is a bank precharge operation to be executed by thebank precharge command.
 3. The memory of claim 2, wherein the controlcircuit performs an operation of receiving a column address signal whena read/write command is input after the second command.
 4. The memory ofclaim 1, wherein the first command is a read/write with auto-prechargecommand, and the first operation is a bank precharge operation to beexecuted by the read/write with auto-precharge command.
 5. The memory ofclaim 4, wherein the control circuit performs an operation of receivinga column address signal when the first command is input.
 6. The memoryof claim 1, further comprising a second word line configured to selectthe rows together, wherein the row decoder activates the second wordline based on the first row address signal, and activates one of thefirst word lines based on the second row address signal.
 7. The memoryof claim 6, wherein one of the first word lines and the second word lineare activated when the second command is input.
 8. The memory of claim6, wherein the second word line is activated when the first command isinput, and one of the first word lines is activated when the secondcommand is input.
 9. The memory of claim 1, further comprising a secondword line configured to select the rows together, wherein the rowdecoder activates the second word line based on the first row addresssignal and the second row address signal.
 10. The memory of claim 1,wherein the address latch circuit keeps latching the first row addresssignal until the second command is input.
 11. The memory of claim 1,wherein the second command is an active command, the third operation isan active operation to be executed by the active command, and the secondoperation is a preactive operation of preparing for the activeoperation.
 12. The memory of claim 1, wherein a bank as a target of thesecond operation and a bank as a target of the first operation areselected at the same time.
 13. The memory of claim 1, wherein a bank asa target of the second operation is selected independently of a bank asa target of the first operation.
 14. The memory of claim 1, furthercomprising a clock generator configured to generate an internal clocksignal, wherein the first command and the bank address signal are inputbased on a high edge of one clock cycle of the internal clock signal.15. The memory of claim 1, further comprising a clock generatorconfigured to generate an internal clock signal, wherein the firstcommand is input based on a high edge of one clock cycle of the internalclock signal, a third command determines that the second operation is anoperation of preparing for the third operation, and the third command isinput based on a low edge of the one clock cycle.
 16. The memory ofclaim 1, further comprising a clock generator configured to generate aninternal clock signal, wherein the bank address signal is input based ona high edge of one clock cycle of the internal clock signal, and a bankaddress signal which designates a bank as a target of the first rowaddress signal is input based on a low edge of the one clock cycle. 17.The memory of claim 1, further comprising a clock generator configuredto generate an internal clock signal, wherein the first row addresssignal is input based on at least one of a high edge and low edge of oneclock cycle of the internal clock signal.
 18. The memory of claim 1,further comprising a clock generator configured to generate an internalclock signal, wherein the second command and the second row addresssignal are input based on a high edge of one clock cycle of the internalclock signal.
 19. The memory of claim 1, further comprising a clockgenerator configured to generate an internal clock signal, wherein thesecond row address signal is input based on at least one of a high edgeand low edge of one clock cycle of the internal clock signal.
 20. Anonvolatile random access memory comprising: a memory cell arrayincluding banks, each bank including rows; first word lines formed inone-to-one correspondence with the rows; an address latch circuitconfigured to latch a first row address signal; a row decoder configuredto activate one of the first word lines; a clock generator configured togenerate an internal clock signal; and a control circuit configured toreceive a first command based on a high edge of one clock cycle of theinternal clock signal, and receive a second command based on a low edgeof the one clock cycle.
 21. The memory of claim 20, wherein the controlcircuit performs a first operation of activating one of the banks basedon a bank address signal, when the first command is input, performs asecond operation of latching the first row address signal in the addresslatch circuit, when the second command is input, and performs a thirdoperation of activating one of the first word lines by the row decoderbased on a second row address signal and the first row address signallatched in the address latch circuit, when a third command is inputafter the second command.
 22. The memory of claim 21, further comprisinga second word line configured to select the rows together, wherein therow decoder activates the second word line based on the first rowaddress signal, and activates one of the first word lines based on thesecond row address signal.
 23. The memory of claim 22, wherein one ofthe first word lines and the second word line are activated when thethird command is input.
 24. The memory of claim 22, wherein the secondword line is activated when the second command is input, and one of thefirst word lines is activated when the third command is input.
 25. Thememory of claim 21, further comprising a second word line configured toselect the rows together, wherein the row decoder activates the secondword line based on the first row address signal and the second rowaddress signal.
 26. The memory of claim 21, wherein the address latchcircuit keeps latching the first row address signal until the thirdcommand is input.
 27. The memory of claim 21, wherein the first commandis a bank precharge command, and the first operation is a bank prechargeoperation to be executed by the bank precharge command, the secondcommand is a preactive command, and the second operation is a preactiveoperation to be executed by the preactive command, and the third commandis an active command, and the third operation is an active operation tobe executed by the active command.
 28. The memory of claim 27, whereinthe control circuit performs an operation of receiving a column addresssignal, when a read/write command is input after the third command. 29.The memory of claim 21, wherein the first command is a read/write withauto-precharge command, and the first operation is a bank prechargeoperation to be executed by the read/write with auto-precharge command,the second command is a preactive command, and the second operation is apreactive operation to be executed by the preactive command, and thethird command is an active command, and the third operation is an activeoperation to be executed by the active command.
 30. The memory of claim29, wherein the control circuit performs an operation of receiving acolumn address signal when the first command is input.
 31. The memory ofclaim 21, wherein a bank as a target of the second operation and a bankas a target of the first operation are selected at the same time. 32.The memory of claim 21, wherein a bank as a target of the secondoperation is selected independently of a bank as a target of the firstoperation.
 33. The memory of claim 21, wherein the bank address signalis input based on the high edge of the one clock cycle.
 34. The memoryof claim 21, wherein the bank address signal is input based on the highedge of the one clock cycle, and a bank address signal for designating abank as a target of the first row address signal is input based on thelow edge of the one clock cycle.
 35. The memory of claim 21, wherein thefirst row address signal is input based on at least one of the high edgeand low edge of the one clock cycle.